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Annotation of researchv10no/cmd/tbl/tmp/sample15, revision 1.1

1.1     ! root        1: .sp 1i
        !             2: .ll 6.0i
        !             3: .TS
        !             4: allbox;
        !             5: c s s s s
        !             6: c c s s s
        !             7: c c c c c.
        !             8: .ft B
        !             9: .sp 1
        !            10: \s14Implantation Time \s10versus \s14Dose \s10and \s14Beam Current \s10(3" Wafer)
        !            11: .sp 2
        !            12:        Beam Current
        !            13: .sp 2
        !            14: Dose   1 mA    100 \(*mA       10 \(*mA        1 \(*mA
        !            15: .sp 2
        !            16: 10\u\s816\s10\d cm\u\s8-2\s10\d        \ft R1.6 min.   16 min. 2.7 hr. 1.1day
        !            17: .sp 2
        !            18: .ft B
        !            19: 10\u\s815\s10\d        \ft R10sec.     1.6 min.        16 min. 2.7 hr.
        !            20: .sp 2
        !            21: .ft B
        !            22: 10\u\s814\s10\d        \ft R1 sec.     10 sec. 1.6min. 16 min.
        !            23: .sp 2
        !            24: .ft B
        !            25: 10\u\s813\s10\d\ft R           1 sec.  10 sec. 1.6 min.
        !            26: .sp 2
        !            27: .ft B
        !            28: 10\u\s812\s10\d\ft R                   1 sec.  10 sec.
        !            29: .sp 1
        !            30: .TE
        !            31: .sp1i
        !            32: .ll 6.0i
        !            33: .TS
        !            34: allbox;
        !            35: c s s s s
        !            36: c c s s s
        !            37: c c c c c.
        !            38: .fB
        !            39: \s14Implantation Time \s10versus \s14Dose \s10and \s14Beam Current \s10(3" Wafer)
        !            40: .sp 1
        !            41:        Beam Current
        !            42: .sp 1
        !            43: Dose   1 mA    100 \(*mA       10 \(*mA        1 \(*mA
        !            44: .sp 1
        !            45: 10\u\s816\s10\d cm\u\s8-2\s10\d        \fR1.6 min.     16 min. 2.7 hr. 1.1day
        !            46: .sp 1
        !            47: .fB
        !            48: 10\u\s815\s10\d        \fR10sec.       1.6 min.        16 min. 2.7 hr.
        !            49: .sp 1
        !            50: .fB
        !            51: 10\u\s814\s10\d        \fR1 sec.       10 sec. 1.6min. 16 min.
        !            52: .sp 1
        !            53: .fB
        !            54: 10\u\s813\s10\d\fR             1 sec.  10 sec. 1.6 min.
        !            55: .sp 1
        !            56: .fB
        !            57: 10\u\s812\s10\d\fR                     1 sec.  10 sec.
        !            58: .TE

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