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Annotation of researchv10no/cmd/tbl/tmp/sample15, revision 1.1.1.1

1.1       root        1: .sp 1i
                      2: .ll 6.0i
                      3: .TS
                      4: allbox;
                      5: c s s s s
                      6: c c s s s
                      7: c c c c c.
                      8: .ft B
                      9: .sp 1
                     10: \s14Implantation Time \s10versus \s14Dose \s10and \s14Beam Current \s10(3" Wafer)
                     11: .sp 2
                     12:        Beam Current
                     13: .sp 2
                     14: Dose   1 mA    100 \(*mA       10 \(*mA        1 \(*mA
                     15: .sp 2
                     16: 10\u\s816\s10\d cm\u\s8-2\s10\d        \ft R1.6 min.   16 min. 2.7 hr. 1.1day
                     17: .sp 2
                     18: .ft B
                     19: 10\u\s815\s10\d        \ft R10sec.     1.6 min.        16 min. 2.7 hr.
                     20: .sp 2
                     21: .ft B
                     22: 10\u\s814\s10\d        \ft R1 sec.     10 sec. 1.6min. 16 min.
                     23: .sp 2
                     24: .ft B
                     25: 10\u\s813\s10\d\ft R           1 sec.  10 sec. 1.6 min.
                     26: .sp 2
                     27: .ft B
                     28: 10\u\s812\s10\d\ft R                   1 sec.  10 sec.
                     29: .sp 1
                     30: .TE
                     31: .sp1i
                     32: .ll 6.0i
                     33: .TS
                     34: allbox;
                     35: c s s s s
                     36: c c s s s
                     37: c c c c c.
                     38: .fB
                     39: \s14Implantation Time \s10versus \s14Dose \s10and \s14Beam Current \s10(3" Wafer)
                     40: .sp 1
                     41:        Beam Current
                     42: .sp 1
                     43: Dose   1 mA    100 \(*mA       10 \(*mA        1 \(*mA
                     44: .sp 1
                     45: 10\u\s816\s10\d cm\u\s8-2\s10\d        \fR1.6 min.     16 min. 2.7 hr. 1.1day
                     46: .sp 1
                     47: .fB
                     48: 10\u\s815\s10\d        \fR10sec.       1.6 min.        16 min. 2.7 hr.
                     49: .sp 1
                     50: .fB
                     51: 10\u\s814\s10\d        \fR1 sec.       10 sec. 1.6min. 16 min.
                     52: .sp 1
                     53: .fB
                     54: 10\u\s813\s10\d\fR             1 sec.  10 sec. 1.6 min.
                     55: .sp 1
                     56: .fB
                     57: 10\u\s812\s10\d\fR                     1 sec.  10 sec.
                     58: .TE

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